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FEI Quanta 200 ESEM with Gatan MONOCL3 System

 Quanta 200 SEM

 Liquid Helium cold stage

FEI Quanta 200 ESEM

Gatan CF302 continuous flow liquid helium cold stage

The FEI Quanta 200 Environmental Scanning Electron Microscope (ESEM) is a thermal tungsten gun instrument capable of imaging under three vacuum regimes, High-vacuum (< 6e-4 Pa), Low-vacuum (10 - 130 Pa) and ESEM-vacuum (10 - 2600 Pa). It is capable of SE imaging at the following resolutions for the given settings:

High-vacuum

  • 3.0nm at 30kV
  • 10nm at 3kV

Low-vacuum

  • 3.0nm at 30kV
  • <12nm at 3kV

ESEM-vacuum

  • 3.0nm at 30kV

The Quanta is equipped with a Gatan MONOCL3 system for acquiring cathodoluminescence spectra and images. It has a Czerny Turner monochromator with a Peltier cooled Hamamatsu R943-02 PMT UV-Vis detector and a liquid nitrogen cooled Hamamatsu R-5509-72 PMT IR detector. A Gatan C1002 liquid nitrogen cold stage is available for cooling samples to 80 K while a Gatan CF302 continuous flow liquid helium cold stage is available for cooling to 5 K. A Melles Griot HeCd 100 mW dual wavelength laser is available for simultaneous PL studies with excitation at 325 and 442 nm.

Kleindiek micromanipulators can also be fitted to this microscope.

Inside Quanta Chamber

Inside the Quanta Chamber with CL mirror in place