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X-ray Photoelectron Spectroscopy (XPS) is a quantitative spectroscopic technique that measures the empirical formula, chemical state and electronic state of the elements that exist within a material. XPS spectra are obtained by irradiating a material with a beam of X-rays while simultaneously measuring the kinetic energy (KE) and number of electrons that escape from the top 1 to 10 nm of the material being analysed. XPS requires ultra-high vacuum (UHV) conditions.
- Un-monochromated Al and Mg X-ray source
- Single sample
- Ion gun etching
- Sample heating and cooling
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