Zeiss Supra 55VP SEM with Raith Elphy Plus & EBSD

The Zeiss Supra 55VP SEM is a high resolution Field Emission SEM (FESEM) as evidenced by the resolution specifications below:

1.0nm @ 15 kV
1.7nm @ 1 kV
3.5nm @ 0.2kV
4.0nm @ 1kV
2.0nm @ 30 kV (VP mode)

Its high efficiency in-lens detector produces exceptional quality SE images down to  0.1kV and BSE, Everhart-Thornley SE and VPSE detectors may also be used for imaging. It has variable pressure capability between 2 - 133 Pa using the gas luminescence type VPSE detector. An Oxford EDS system is also available for elemental characterisation as is an HKL EBSD (Electron Backscatter Diffraction) system for crystal orientation analysis and mapping.

Raith Elphy Plus

• Pattern generation software

• 6 MHz high speed pattern generation hardware

• 2 ns writing speed resolution