City Campus: Building 4, cnr Harris Street and Thomas street, Ultimo, NSW 2007, Australia

Building 1, 15 Broadway, Ultimo, NSW 2007, Australia

The Microstructural Analysis Unit (MAU)
Building 4, cnr Harris Street and Thomas street, Ultimo, NSW 2007, Australia
p: + 61 2 9514 7817
f: + 61 2 9514 1703
mau@uts.edu.au

Director, MAU
Associate Professor Matthew Philip
p: + 61 2 9514 1620
f: + 61 2 9514 1703
Matthew.Philip@uts.edu.au

Postal address:
Microstructural Analysis Unit
Faculty of Science
University of Technology, Sydney
P.O. Box 123
Broadway, NSW 2007
Australia

Thin Film Coating Chambers

Edwards EO6 Deposition System

The Edwards EO6 Deposition System is:

Diffusion pumped system to 10-6 Torr
DC and RF sputtering
Thermal evaporation of up to 2 sources sequentially
Substrate heating to 400°C
Thickness monitoring via quartz crystal microbalance

Denton DV502 Turbo Deposition System

The Denton DV502 Turbo Deposition System is:

Turbo pumped system to 10-6 Torr
Thermal evaporation of up to 2 sources sequentially
Substrate heating to 400°C
Thickness monitoring via quartz crystal microbalance

Dynavac CE12-14s Evaporation System

The Dynavac CE12-14s Evaporation System is:

Diffusion pumped system to 10-6 Torr
DC and RF sputtering of 2 sources simultaneously
Reactive sputtering with Oxygen atmosphere
Substrate heating to 400°C

Shannon E-beam Evaporation System

The Shannon E-beam Evaporation System is:

Diffusion pumped system to 10-6 Torr
E-beam evaporation
Substrate heating to 400°C
Thickness monitoring via quartz crystal microbalance

Events