Scanning electron microscopes (SEM)
Zeiss Supra 55VP SEM with Raith E-beam Lithography System & HKL EBSD
The Zeiss Supra 55VP SEM is a high resolution "Field Emission Scanning Electron Microscopes" (FESEM) as indicated by the resolution specifications.
- 1.0nm @ 15 kV
- 1.7nm @ 1 kV
- 3.5nm @ 0.2kV
- 4.0nm @ 1kV
- 2.0nm @ 30 kV (VP mode)
Its high efficiency in-lens detector produces exceptional quality scanning electron images down to 0.1kV and BSE, Everhart-Thornley SE and VPSE detectors may also be used for imaging.
It has variable pressure capability between 2 - 133 Pa using a gas luminescence type VPSE detector. An Oxford EDS system is also available for elemental characterisation as is an HKL Electron Backscatter Diffraction (EBSD) system for crystal orientation analysis and mapping.
FEI XL30 ESEM
In an Environmental Scanning Electron Microscope (ESEM) all specimens, either wet or dry, conductive or insulating, can be examined in their natural state without the need for specimen preparation.
In wet mode, specimens can be examined at pressures up to 2600 Pa (3 nm resolution), in a variety of gaseous atmospheres and temperatures (-30°C to 1000°C). A unique application of ESEM is dynamic in-situ studies of surfaces during heating or freezing experiments in a variety of gaseous atmospheres and (de)hydration experiments.
FEI Quanta 200 ESEM with Gatan CF302 continuous flow liquid helium cold stage
The FEI Quanta 200 Environmental Scanning Electron Microscope (ESEM) is a thermal tungsten gun instrument capable of imaging under three vacuum regimes, High-vacuum (< 6e-4 Pa), Low-vacuum (10 - 130 Pa) and ESEM-vacuum (10 - 2600 Pa). It is capable of SE imaging at the following resolutions for the given settings:
- High-vacuum: 3.0nm at 30kV or 10nm at 3kV
- Low-vacuum: 3.0nm at 30kV or < 12nm at 3kV
- ESEM-vacuum: 3.0nm at 30kV
The Quanta is equipped with a Gatan MONOCL3 system for acquiring cathodoluminescence spectra and images. It has a Czerny Turner monochromator with a Peltier cooled Hamamatsu R943-02 PMT UV-Vis detector and a liquid nitrogen cooled Hamamatsu R-5509-72 PMT IR detector. A Gatan C1002 liquid nitrogen cold stage is available for cooling samples to 80 K while a Gatan CF302 continuous flow liquid helium cold stage is available for cooling to 5 K. A Melles Griot HeCd 100 mW dual wavelength laser is available for simultaneous PL studies with excitation at 325 and 442 nm.
Kleindiek nanomanipulators can also be fitted to this microscope.
JEOL 35CF SEM with XRM
The Jeol 35CF is a conventional thermionic tungsten electron gun Scanning Electron Microscope equipped with:
- Secondary electron detector providing 6 nm spatial resolution
- Backscattered electron and absorbed current (for Electron Beam Induced Current) detectors
- Two Energy Dispersive X-ray Detectors with a Moran Scientific quantitative X-ray analysis and quantitative X-ray mapping system
JEOL 35C SEM with XRM
The Jeol 35CF is a conventional thermionic tungsten electron gun Scanning Electron Microscope equipped with:
- Secondary electron detector providing 6 nm spatial resolution
- One Energy Dispersive X-ray Detector and one Wavelength Dispersive X-ray detector with a Moran Scientific quantitative X-ray analysis and quantitative X-ray mapping system
FEI Sirion SEM
The FEI Sirion SEM was donated to UTS by FEI in 2011 as part of a research project collaboration. It is dedicated to several research projects related to in-situ beam chemistry.
